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    Extreme Ultraviolet EUV Lithography Market

    ID: MRFR/SEM/10851-HCR
    128 Pages
    Aarti Dhapte
    October 2025

    Extreme Ultraviolet (EUV) Lithography Market Research Report Information By Equipment (Light, Source, Opitcs, Mask And Others), By End User (Integrated Device Manufacturer (IDM) And Foundries) And By Region (North America, Europe, Asia-Pacific, And Rest Of The World) – Industry Size, Share and Forecast Till 2035

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    Extreme Ultraviolet EUV Lithography Market Infographic
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    Extreme Ultraviolet EUV Lithography Market Summary

    As per MRFR analysis, the Extreme Ultraviolet (EUV) Lithography Market Size was estimated at 18.75 USD Billion in 2024. The EUV lithography industry is projected to grow from 22.97 in 2025 to 174.83 by 2035, exhibiting a compound annual growth rate (CAGR) of 22.5 during the forecast period 2025 - 2035.

    Key Market Trends & Highlights

    The Extreme Ultraviolet (EUV) Lithography Market is poised for substantial growth driven by technological advancements and increasing demand for miniaturization.

    • North America remains the largest market for EUV lithography, driven by its robust semiconductor industry.
    • Asia-Pacific is emerging as the fastest-growing region, fueled by rapid technological adoption and manufacturing expansion.
    • The light source segment dominates the market, while the optics segment is experiencing the fastest growth due to innovations in design.
    • Rising demand for advanced semiconductor devices and increased investment in research and development are key drivers propelling market expansion.

    Market Size & Forecast

    2024 Market Size 18.75 (USD Billion)
    2035 Market Size 174.83 (USD Billion)
    CAGR (2025 - 2035) 22.5%

    Major Players

    ASML (NL), Nikon (JP), Canon (JP), Samsung Electronics (KR), Intel (US), Taiwan Semiconductor Manufacturing Company (TW), GlobalFoundries (US), Micron Technology (US), SK Hynix (KR)

    Extreme Ultraviolet EUV Lithography Market Trends

    The Extreme Ultraviolet (EUV) Lithography Market is currently experiencing a transformative phase, driven by the increasing demand for advanced semiconductor manufacturing technologies. As the industry progresses towards smaller nodes, the necessity for precise lithography techniques becomes paramount. EUV lithography, with its ability to produce intricate patterns on silicon wafers, appears to be at the forefront of this evolution. Major players in the semiconductor sector are investing heavily in EUV systems, which suggests a robust growth trajectory for this market. Furthermore, the integration of EUV technology into production lines is likely to enhance efficiency and yield, thereby attracting more manufacturers to adopt this innovative approach. In addition to technological advancements, the Extreme Ultraviolet (EUV) Lithography Market is also influenced by geopolitical factors and supply chain dynamics. The ongoing competition among global semiconductor manufacturers has led to strategic partnerships and collaborations aimed at enhancing EUV capabilities. This collaborative spirit may foster innovation and accelerate the development of next-generation lithography solutions. As the market continues to evolve, it is essential to monitor these trends closely, as they could shape the future landscape of semiconductor manufacturing and influence the competitive positioning of key industry players.

    Technological Advancements

    The Extreme Ultraviolet (EUV) Lithography Market is witnessing rapid technological advancements that enhance the precision and efficiency of semiconductor manufacturing. Innovations in light source technology and optics are likely to improve the performance of EUV systems, making them more accessible to a broader range of manufacturers.

    Geopolitical Influences

    Geopolitical factors are playing a crucial role in shaping the Extreme Ultraviolet (EUV) Lithography Market. Trade policies and international collaborations among semiconductor firms may impact the availability and distribution of EUV technology, potentially leading to shifts in market dynamics.

    Sustainability Initiatives

    Sustainability is becoming increasingly relevant in the Extreme Ultraviolet (EUV) Lithography Market. Manufacturers are exploring eco-friendly practices and materials in their production processes, which may not only reduce environmental impact but also appeal to a growing segment of environmentally conscious consumers.

    The ongoing advancements in semiconductor manufacturing technologies, particularly the adoption of Extreme Ultraviolet (EUV) lithography, are poised to redefine the landscape of high-performance electronics, enhancing efficiency and enabling the production of smaller, more powerful chips.

    U.S. Department of Commerce, National Institute of Standards and Technology (NIST)

    Extreme Ultraviolet EUV Lithography Market Drivers

    Strategic Collaborations and Partnerships

    Strategic collaborations and partnerships among key players in the semiconductor industry are shaping the Extreme Ultraviolet (EUV) Lithography Market. These alliances often focus on sharing expertise, resources, and technology to accelerate the development and deployment of EUV lithography solutions. For example, partnerships between equipment manufacturers and semiconductor fabs have led to the co-development of advanced EUV systems tailored to specific manufacturing needs. Such collaborations are essential for overcoming the technical challenges associated with EUV technology and are likely to enhance its adoption across various sectors. As these partnerships continue to evolve, they may significantly impact the competitive landscape of the EUV lithography market.

    Technological Advancements in EUV Equipment

    Technological advancements in EUV equipment are propelling the Extreme Ultraviolet (EUV) Lithography Market forward. Innovations in light source technology, optics, and mask design have significantly improved the efficiency and effectiveness of EUV lithography systems. For instance, the introduction of high-power EUV light sources has enhanced throughput, making it feasible for manufacturers to adopt this technology at scale. As of 2025, the market for EUV lithography equipment is expected to surpass 10 billion dollars, driven by these advancements. The continuous evolution of EUV technology not only enhances production capabilities but also enables the fabrication of more complex semiconductor devices, thereby expanding its application scope.

    Growing Need for Miniaturization in Electronics

    The growing need for miniaturization in electronics is a crucial factor driving the Extreme Ultraviolet (EUV) Lithography Market. As devices become smaller and more powerful, the demand for lithography techniques that can produce finer features is paramount. EUV lithography offers the precision required to create intricate patterns on silicon wafers, facilitating the production of compact and efficient semiconductor components. This trend is particularly evident in the smartphone and wearable technology sectors, where manufacturers are striving to deliver high-performance devices in smaller form factors. The miniaturization trend is expected to continue, further increasing the reliance on EUV technology in semiconductor manufacturing.

    Increased Investment in Research and Development

    Investment in research and development within the semiconductor sector is significantly influencing the Extreme Ultraviolet (EUV) Lithography Market. Companies are allocating substantial resources to innovate and enhance lithography technologies, aiming to achieve higher yields and lower production costs. This trend is evident as major semiconductor manufacturers have reported R&D expenditures exceeding 20 billion dollars annually. The focus on developing next-generation chips, particularly for applications in artificial intelligence and high-performance computing, underscores the necessity for advanced lithography solutions like EUV. As these investments continue to grow, they are likely to accelerate the adoption of EUV technology, further solidifying its position in the market.

    Rising Demand for Advanced Semiconductor Devices

    The increasing demand for advanced semiconductor devices is a primary driver of the Extreme Ultraviolet (EUV) Lithography Market. As consumer electronics, automotive applications, and IoT devices proliferate, manufacturers are compelled to produce smaller, more efficient chips. This trend necessitates the adoption of EUV lithography, which enables the fabrication of intricate patterns at nanoscale dimensions. According to recent data, the semiconductor industry is projected to reach a valuation of over 1 trillion dollars by 2030, with EUV technology playing a pivotal role in meeting this demand. The ability of EUV lithography to enhance chip performance while reducing power consumption positions it as a critical technology in the semiconductor manufacturing landscape.

    Market Segment Insights

    By Equipment: Light Source (Largest) vs. Optics (Fastest-Growing)

    In the Extreme Ultraviolet (EUV) Lithography Market, the distribution of market share among the equipment segment values showcases significant dynamics. The Light Source segment holds the largest market share due to its critical role in the lithographic process, providing the necessary wavelength for high-resolution patterning. In contrast, the Optics segment is experiencing rapid growth as technological advancements drive demand for improved imaging capabilities, thus positioning itself as a vital component in EUV systems. Growth trends within this segment suggest that while the Light Source continues to lead, the Optics segment is gaining traction. Innovations in optical components that enhance efficiency and resolution are leading to increased investments in this area, making it a focal point for manufacturers. As the market expands, both segments are expected to evolve, reflecting the ongoing shifts in lithography techniques and the push towards smaller, more integrated semiconductor technologies.

    Optics (Dominant) vs. Mask (Emerging)

    Within the equipment segment of the EUV Lithography Market, Optics has emerged as a dominant force due to its essential function in focusing and directing the EUV light onto the wafer. The advancements in optical technologies, including the development of specialized materials and coatings, have significantly improved the performance of lithographic systems. Meanwhile, the Mask segment, while currently seen as emerging, plays a pivotal role in defining circuit patterns. Continuous research and development efforts aim to refine mask materials and techniques to enhance their compatibility with EUV wavelengths. Both Optics and Mask must adapt to the evolving demands of the semiconductor industry, balancing innovation with cost-effectiveness to maintain their market positions.

    By End User: Integrated Device Manufacturer (IDM) (Largest) vs. Foundries (Fastest-Growing)

    The 'Extreme Ultraviolet (EUV) Lithography Market' showcases a competitive landscape between Integrated Device Manufacturers (IDMs) and Foundries. IDMs hold the largest share of the market due to their ability to integrate design and manufacturing processes effectively, allowing them to optimize production costs and enhance their product offerings. Foundries, however, are emerging strong, capturing significant attention as they cater to an increasing demand from fabless companies and those seeking external manufacturing capabilities.

    Integrated Device Manufacturer (IDM) (Dominant) vs. Foundries (Emerging)

    Integrated Device Manufacturers (IDMs) are characterized by their substantial investment in advanced lithography technology and in-house production capabilities, allowing them to control quality and maintain competitive edges in product innovation. They typically develop a broad spectrum of semiconductors, meeting diverse industry needs. Conversely, Foundries are positioned as emerging players, utilizing EUV lithography to cater to the growing market of fabless semiconductor companies, which rely on external partners for manufacturing. This segment benefits from partnerships, enhancing flexibility and scaling production to meet varying demands. The rapid technological advancements are also boosting their capability to produce chips with smaller geometries, further elevating their role in the EUV ecosystem.

    Get more detailed insights about Extreme Ultraviolet EUV Lithography Market

    Regional Insights

    By region, the study provides the market insights into North America, Europe, Asia-Pacific and Rest of the World. The North American Extreme Ultraviolet (EUV) Lithography Market area will dominate this market, owing to increased demand for technologically advanced products including smartphones, laptops, and others. As Washington steps up its efforts to constrain Beijing's ability to produce cutting-edge semiconductors and gain dominance over strategic technologies, China will find it more difficult to catch up to the US and its semiconductor sector partners.

    Last week, Washington imposed limitations on the sale to China of specified Nvidia and AMD sophisticated Graphic Processor Units (GPUs) used in supercomputers and artificial intelligence applications. Washington has been encouraging its East Asian allies Taiwan, South Korea, and Japan to join a "Chip 4" industry alliance in order to exclude China from the global digital ecosystem.

    Further, the major countries studied in the market report are The US, Canada, German, France, the UK, Italy, Spain, China, Japan, India, Australia, South Korea, and Brazil.

    Figure2: EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY MARKET SHARE BY REGION 2022 (USD Billion)

    EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY MARKET SHARE BY REGION 2022

    Europe Extreme Ultraviolet (EUV) Lithography Market accounts for the second-largest market share because of the region's high demand for tiny technologies and modern cellphones. Further, the German Extreme Ultraviolet (EUV) Lithography Market held the largest market share, and the UK Extreme Ultraviolet (EUV) Lithography Market was the fastest growing market in the European region

    The Asia-Pacific Extreme Ultraviolet (EUV) Lithography Market is expected to grow at the fastest CAGR from 2023 to 2032. This is because of the significant demand from Fab-less players at top foundries in the region, as well as the growing number of wafer processing capabilities. The presence of a large number of leading foundries, such as Toshiba. Samsung and SK Hynix are the market leaders in the region. Moreover, China’s Extreme Ultraviolet (EUV) Lithography Market held the largest market share, and the IndianExtreme Ultraviolet (EUV) Lithography Market was the fastest growing market in the Asia-Pacific region.

    Key Players and Competitive Insights

    Leading market players are investing heavily in research and development in order to expand their product lines, which will help the Extreme Ultraviolet (EUV) Lithography Market, grow even more. Market participants are also undertaking a variety of strategic activities to expand their global footprint, with important market developments including new product launches, contractual agreements, mergers and acquisitions, higher investments, and collaboration with other organizations. To expand and survive in a more competitive and rising market climate, Extreme Ultraviolet (EUV) Lithography industry must offer cost-effective items.

    Manufacturing locally to minimize operational costs is one of the key business tactics used by manufacturers in the global Extreme Ultraviolet (EUV) Lithography industry to benefit clients and increase the market sector. In recent years, the Extreme Ultraviolet (EUV) Lithography industry has offered some of the most significant advantages to medicine. Major players in the Extreme Ultraviolet (EUV) Lithography Market, including Nikon Corporation, Cannon Inc., ASML and others, are attempting to increase market demand by investing in research and development operations.

    ASML Holding N.V. is a Dutch international firm that was created in 1984. ASML specializes in the design and manufacture of photolithography devices used in the production of computer chips. As of 2022, it is the world's largest semiconductor provider and the sole supplier of extreme ultraviolet lithography (EUV) photolithography machines, which are necessary to build the most modern chips. ASML had a market capitalization of over US$280 billion as of June 2023, making it the most valuable European technology business.

    In December 2021, ASML, a hot stock in Europe, is releasing a new version of its extreme ultraviolet lithography equipment, which is used to carve patterns into silicon chips required to construct the world's most powerful CPUs. Using their existing EUV equipment, Samsung, TSMC, and Intel develop chips for the next generation of PCs and smartphones.

    NTT DATA Corporation is a global Japanese information technology (IT) service and consulting firm headquartered in Tokyo. Nippon Telegraph and Telephone (NTT) owns a portion of the company. NTT's predecessor, Japan Telegraph and Telephone Public Corporation, began its Data Communications business in 1967. Following its privatization in 1985, NTT spun off its Data Communications section as NTT DATA in 1988, becoming the largest of Japan's IT Services companies. In June 2022, lITG and NTT-AT signed a Memorandum of Understanding (MOU) to improve industry-academia collaboration on advanced technologies by sharing information, conducting collaborative research, and exchanging resources. 

    Key Companies in the Extreme Ultraviolet EUV Lithography Market market include

    Industry Developments

    March 2021, Samsung is ramping up production of EUV scanners capable of competing with the world's largest foundry, TSMC. EUV scanners, as opposed to traditional machines, optimize the chip fabrication process by decreasing the number of photolithography procedures required to build finer circuits, forcing major chipmakers to compete for the technology.

    June 2022, ASML launched a new technology education program alongside Mad Science. The ASL Junior Academy initiative will provide technology teaching to all 271 primary schools in the Brainport-Eindhoven region. This means that Mad Science will teach around 60,000 children about technology each year through the curriculum. The ASML Junior Academy will begin in fifty primary schools in September.

    Future Outlook

    Extreme Ultraviolet EUV Lithography Market Future Outlook

    The Extreme Ultraviolet (EUV) Lithography Market is projected to grow at a 22.5% CAGR from 2024 to 2035, driven by advancements in semiconductor technology and increasing demand for miniaturization.

    New opportunities lie in:

    • Development of advanced photomasks for enhanced resolution
    • Integration of AI-driven analytics in lithography processes
    • Expansion into emerging markets with tailored EUV solutions

    By 2035, the EUV Lithography Market is expected to achieve substantial growth and technological advancements.

    Market Segmentation

    Extreme Ultraviolet EUV Lithography Market End User Outlook

    • Integrated Device Manufacturer (IDM)
    • Foundries

    Extreme Ultraviolet EUV Lithography Market Equipment Outlook

    • Light Source
    • Optics
    • Mask
    • Others

    Report Scope

    MARKET SIZE 202418.75(USD Billion)
    MARKET SIZE 202522.97(USD Billion)
    MARKET SIZE 2035174.83(USD Billion)
    COMPOUND ANNUAL GROWTH RATE (CAGR)22.5% (2024 - 2035)
    REPORT COVERAGERevenue Forecast, Competitive Landscape, Growth Factors, and Trends
    BASE YEAR2024
    Market Forecast Period2025 - 2035
    Historical Data2019 - 2024
    Market Forecast UnitsUSD Billion
    Key Companies ProfiledMarket analysis in progress
    Segments CoveredMarket segmentation analysis in progress
    Key Market OpportunitiesAdvancements in semiconductor miniaturization drive demand for Extreme Ultraviolet (EUV) Lithography Market technologies.
    Key Market DynamicsTechnological advancements in Extreme Ultraviolet Lithography drive competitive dynamics and influence semiconductor manufacturing processes.
    Countries CoveredNorth America, Europe, APAC, South America, MEA

    Market Highlights

    Author
    Aarti Dhapte
    Team Lead - Research

    She holds an experience of about 6+ years in Market Research and Business Consulting, working under the spectrum of Information Communication Technology, Telecommunications and Semiconductor domains. Aarti conceptualizes and implements a scalable business strategy and provides strategic leadership to the clients. Her expertise lies in market estimation, competitive intelligence, pipeline analysis, customer assessment, etc.

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    FAQs

    How much is the Extreme Ultraviolet (EUV) Lithography Market?

    The Extreme Ultraviolet (EUV) Lithography Market size was valued at USD 18.75 billion in 2024.

    What is the growth rate of the Extreme Ultraviolet (EUV) Lithography Market?

    The global market is projected to grow at a CAGR of 22.50% during the forecast period, 2025 to 2035.

    Which region held the largest market share in the Extreme Ultraviolet (EUV) Lithography Market?

    North America had the largest share in the global market

    Who are the key players in the Extreme Ultraviolet (EUV) Lithography Market?

    The key players in the market are Nikon Corporation, Cannon Inc., and ASML.

    Which Equipment led the Extreme Ultraviolet (EUV) Lithography Market?

    The light source category dominated the market in 2022.

    Which End User had the largest market share in the Extreme Ultraviolet (EUV) Lithography Market?

    The Integrated Device Manufacturer (IDM) had the largest share in the global market.

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