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RAPID EXPANSION OF SEMICONDUCTOR INDUSTRY
Atomic Layer Deposition (ALD) is known in the electronics industry as an enabler for the scaling of logic and memory semiconductor devices. Ultimately, this scaling leads to performance improvement of devices such as dynamic random-access memory (DRAM), advanced fin field effect transistor (FinFET) and Gate All Around transistors. ALD is now percolating into More-than-Moore (MtM) device production, again enabling novel architectures, materials, and performance improvements.
Examples include GaN and SiC transistors, in particular GaN High Electron Mobility Transistors (HEMTs) and SiC trench metal oxide semiconductor FETs (MOSFETs), piezoelectric microelectromechanical systems (MEMS) and radiofrequency (RF) devices or compound semiconductor mini-light emitting diodes (LEDs) and micro-LEDs.
Atomic Layer Deposition (ALD) equipment for the semiconductor industry is used for depositing ultra-thin layers of materials onto a substrate. This technique is commonly used in the fabrication of semiconductors, where precise control over the material thickness and quality is crucial. The ALD equipment for the semiconductor market is expected to witness significant growth in the coming years. The increasing demand for smaller and more efficient electronic devices, such as smartphones, tablets, and wearables, is driving the need for advanced semiconductor fabrication technologies. ALD offers excellent control over the deposition process, enabling the creation of high-quality, atomically precise thin films.
This makes it an ideal choice for various semiconductor applications, including gate dielectrics, passivation layers, and metal and metal nitride films.
MULTIPLE BENEFITS OFFERED BY ALD EQUIPMENT
Atomic Layer Deposition (ALD) equipment offers a numerous of benefits across various sectors due to its precision, uniformity, and versatility in thin film deposition. In the energy storage, ALD plays a crucial role in enhancing the performance and longevity of batteries. By coating electrode materials with thin, protective layers, ALD helps mitigate issues like capacity degradation and enhances the overall efficiency of lithium-ion batteries. This application is vital for electric vehicles, portable electronics, and renewable energy storage systems. In the field of optics and coatings, ALD enables the creation of thin films with tailored optical properties.
It is used to manufacture anti-reflective coatings on lenses, improving the clarity and efficiency of optical systems in cameras, microscopes, and other devices. Additionally, ALD is used in creating protective coatings for eyeglasses and displays, enhancing scratch resistance and durability.
ALD is also utilized in the development of advanced sensors. By depositing thin films on sensor surfaces, it enhances sensitivity and selectivity, crucial for applications in gas sensing, environmental monitoring, and medical diagnostics. The controlled deposition allows for the customization of sensor properties, optimizing performance for specific applications. In the aerospace and automotive industries, it contributes to the development of lightweight and high-performance materials. The technology is used to coat components with protective layers, preventing corrosion and improving durability in harsh environments. This is particularly important for extending the lifespan of critical components in aircraft and automotive systems.
SURGING DEMAND FOR PHOTOVOLTAICS
This results in improved conversion efficiency, which is a critical factor for the economic viability of solar energy.
The increasing demand for advanced materials in various industries is driving innovation in atomic layer deposition technologies, which are poised to enhance the efficiency and performance of chemical applications.
U.S. Department of Energy